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A microfabricated sensor for thin dielectric layers | | P. Fierlinger
; R. DeVoe
; B. Flatt
; G. Gratta
; M. Green
; S. Kolkowitz
; F. Leport
; M. Montero Diez
; R. Neilson
; K. O'Sullivan
; A. Pocar
; J. Wodin
; | | Date: |
4 Jun 2007 | | Abstract: | We describe a sensor for the measurement of thin dielectric layers capable of
operation in a variety of environments. The sensor, obtained by building an
interleaved-fingers surface capacitor on a quartz substrate, performs similar
to a microbalance but does not require vacuum conditions for operation. In
particular, the device can measure thin layers of solid frozen from a liquid or
gaseous medium. Sensitivity to single atomic layers is achievable in many
configurations and, by utilizing fast, high sensitivity capacitance readout in
a feedback system onto environmental parameters, coatings of few layers can be
dynamically maintained. We discuss the design, readout and calibration of
several versions of the device optimized in different ways. We specifically
dwell on the case in which atomically thin solid xenon layers are grown and
stabilized, in cryogenic conditions, from a liquid xenon bath. | | Source: | arXiv, arxiv.0706.0540 | | Services: | Forum | Review | PDF | Favorites | |
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