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19 April 2024

» arxiv » arxiv.0707.2412

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Digital resonance tuning of high-Q/Vm silicon photonic crystal nanocavities by atomic layer deposition
Xiaodong Yang ; Charlton J. Chen ; Chad A. Husko ; Chee Wei Wong ;
Date:	17 Jul 2007
Abstract:	We propose and demonstrate for the first time the digital tuning of high-Q/Vm photonic crystal resonances using a self-limiting atomic layer deposition technique. Control of resonances in discrete steps of 122 plus/minus 18 pm per hafnium oxide atomic layer is achieved through this post-fabrication process, nearly linear over a full 17 nm tuning range. The cavity Q is maintained in this perturbative process, and can reach up to its initial values of 49,000 or more. Our results are highly controllable, applicable to many material systems, and particularly critical to matching resonances and transitions involving mesoscopic optical cavities.
Source:	arXiv, arxiv.0707.2412
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