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18 April 2024

» arxiv » 1011.0254

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On chip, high-sensitivity thermal sensor based on high-Q polydimethylsiloxane-coated microresonator
Bei-Bei Li ; Qing-Yan Wang ; Yun-Feng Xiao ; Xue-Feng Jiang ; Yan Li ; Lixin Xiao ; Qihuang Gong ;
Date:	1 Nov 2010
Abstract:	A high-sensitivity thermal sensing is demonstrated by coating a layer of polydimethylsiloxane (PDMS) on the surface of a silica toroidal microresonator on a silicon wafer. Possessing high-Q whispering gallery modes (WGMs), the PDMS-coated microresonator is highly sensitive to the temperature change of the surroundings. We find that, when the PDMS layer becomes thicker, the WGM experiences a transition from red- to blue-shift with temperature increasing due to the negative thermal-optic coefficient of PDMS. The measured sensitivity (0.151 nm/K) is one order of magnitude higher than pure silica microcavity sensors. The ultra-high resolution of the thermal sensor is also analyzed to reach 10-4 K.
Source:	arXiv, 1011.0254
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