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20 April 2024

» arxiv » 1901.2611

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Electrically Tunable Wafer-Sized Three-Dimensional Topological Insulator Thin Films Grown by Magnetron Sputtering
Qixun Guo ; Yu Wu ; Longxiang Xu ; Yan Gong ; Yunbo Ou ; Yang Liu ; Leilei Li ; Jiao Teng ; Yu Yan ; Gang Han ; Dongwei Wang ; Lihua Wang ; Shibing Long ; Bowei Zhang ; Xun Cao ; Shanwu Yang ; Xuemin Wang ; Yizhong Huang ; Tao Liu ; Guanghua Yu ; Ke He ;
Date:	9 Jan 2019
Abstract:	Three-dimensional (3D) topological insulators (TIs) are candidate materials for various electronic and spintronic devices due to their strong spin-orbit coupling and unique surface electronic structure. Rapid, low-cost preparation of large-area TI thin films compatible with conventional semiconductor technology is key to the practical applications of TIs. Here, we show that wafer-sized Bi2Te3 family TI and magnetic TI films with decent quality and well-controlled composition and properties can be prepared on amorphous SiO2/Si substrates by magnetron cosputtering. The SiO2/Si substrates enable us to electrically tune (Bi1-xSbx)2Te3 and Cr-doped (Bi1-xSbx)2Te3 TI films between p-type and n-type behavior and thus study the phenomena associated with topological surface states, such as the quantum anomalous Hall effect (QAHE). This work significantly facilitates the fabrication of TI-based devices for electronic and spintronic applications.
Source:	arXiv, 1901.2611
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