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Article overview
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Piezoelectrically Tunable Micro Fresnel Mirror Array | Binal Poyyathuruthy Bruno
; Robert Schütze
; Ruediger Grunwald
; Ulrike Wallrabe
; | Date: |
22 Nov 2019 | Abstract: | We present the design and fabrication of a miniaturized array of
piezoelectrically actuated high speed Fresnel mirrors, which can be used to
generate propagation invariant and self-healing interference patterns. The
mirrors are actuated using piezobimorph actuators, and the consequent change of
the tilting angle of the mirrors changes the fringe spacing of the interference
pattern generated. The array consists of four Fresnel mirrors each having an
area of 2x2 mm2 arranged in a 2x2 configuration. The device, optimized using
FEM simulations, is able to achieve maximum mirror deflections of 15 mrad, and
has a resonance frequency of 28 kHz. | Source: | arXiv, 1911.9936 | Services: | Forum | Review | PDF | Favorites |
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