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A Cleanroom in a Glovebox | | Mason J. Gray
; Narendra Kumar
; Ryan O'Connor
; Marcel Hoek
; Erin Sheridan
; Meaghan C. Doyle
; Marisa L. Romanelli
; Gavin B. Osterhoudt
; Yiping Wang
; Vincent Plisson
; Shiming Lei
; Ruidan Zhong
; Bryan Rachmilowitz
; He Zhao
; Hikari Kitadai
; Steven Shepard
; Leslie M. Schoop
; G. D. Gu
; Ilija Zeljkovic
; Xi Ling
; K. S. Burch
; | | Date: |
27 Jul 2020 | | Abstract: | The exploration of new materials, novel quantum phases, and devices requires
ways to prepare cleaner samples with smaller feature sizes. Initially, this
meant the use of a cleanroom that limits the amount and size of dust particles.
However, many materials are highly sensitive to oxygen and water in the air.
Furthermore, the ever-increasing demand for a quantum workforce, trained and
able to use the equipment for creating and characterizing materials, calls for
a dramatic reduction in the cost to create and operate such facilities. To this
end, we present our cleanroom-in-a-glovebox, a system which allows for the
fabrication and characterization of devices in an inert argon atmosphere. We
demonstrate the ability to perform a wide range of characterization as well as
fabrication steps, without the need for a dedicated room, all in an argon
environment. Connection to a vacuum suitcase is also demonstrated to enable
receiving from and transfer to various ultra-high vacuum (UHV) equipment
including molecular-beam epitaxy (MBE) and scanning tunneling microscopy (STM). | | Source: | arXiv, 2007.13784 | | Services: | Forum | Review | PDF | Favorites | |
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