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18 April 2024
 
  » arxiv » cond-mat/0510373

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An ion-implanted silicon single-electron transistor
V.C. Chan ; D.R. McCamey ; T.M. Buehler ; A.J. Ferguson ; D.J. Reilly ; A.S. Dzurak ; R.G. Clark ; C. Yang ; D.N. Jamieson ;
Date 14 Oct 2005
AbstractWe report on the fabrication and electrical characterization at millikelvin temperatures of a novel silicon single-electron transistor (Si-SET). The island and source-drain leads of the Si-SET are formed by the implantation of phosphorus ions to a density above the metal-insulator-transition, with the tunnel junctions created by undoped regions. Surface gates above each of the tunnel junctions independently control the tunnel coupling between the Si-SET island and leads. The device shows periodic Coulomb blockade with a charging energy e$^2$/2C$_Sigma$ $sim$ 250 $mu$eV, and demonstrates a reproducible and controllable pathway to a silicon-based SET using CMOS processing techniques.
Source arXiv, cond-mat/0510373
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