| | |
| | |
Stat |
Members: 3667 Articles: 2'599'751 Articles rated: 2609
09 February 2025 |
|
| | | |
|
Article overview
| |
|
Characterization of Three-Dimensional Microstructures in Single Crystal Diamond | P. Olivero
; S. Rubanov
; P. Reichart
; B. C. Gibson
; S. T. Huntington
; J. R. Rabeau
; A. D. Greentree
; J. Salzman
; D. Moore
; D. N. Jamieson
; S. Prawer
; | Date: |
1 Sep 2016 | Abstract: | We report on the Raman and photoluminescence characterization of
three-dimensional microstructures created in single crystal diamond with a
Focused Ion Beam (FIB) assisted lift-off technique. The method is based on MeV
ion implantation to create a buried etchable layer, followed by FIB patterning
and selective etching. In the applications of such microstructures where the
properties of high quality single crystal diamond are most relevant, residual
damage after the fabrication process represents a critical technological issue.
The results of Raman and photoluminescence characterization indicate that the
partial distortion of the sp3-bonded lattice and the formation of isolated
point defects are effectively removed after thermal annealing, leaving low
amounts of residual damage in the final structures. Three-dimensional
microstructures in single-crystal diamond offer a large range of applications,
such as quantum optics devices and fully integrated opto mechanical assemblies. | Source: | arXiv, 1609.0289 | Services: | Forum | Review | PDF | Favorites |
|
|
No review found.
Did you like this article?
Note: answers to reviews or questions about the article must be posted in the forum section.
Authors are not allowed to review their own article. They can use the forum section.
|
| |
|
|
|