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Alloying effects on electromigration mass transport | | J P Dekker
; C A Volkert
; E Arzt
; P Gumbsch
; | | Date: |
16 Jul 2001 | | Journal: | Phys Rev Lett, 87 (3), 035901 | | Abstract: | Small amounts of alloying elements can significantly retard electromigration in conductor lines. This phenomenon is experimentally well established but is still lacking a fundamental explanation. An atomic-level mechanism for this behavior is proposed here which is based on a kinetic analysis of diffusion in crystalline interfaces. It predicts a reduction or reversal of the flux of host atoms for physically reasonable parameters and can account for the observed effect of copper on electromigration in aluminum conductor lines. | | Source: | PubMed, pmid11461571 | | Services: | Forum | Review | Favorites | |
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